Research Interests 【 display / non-display 】

Research Interests 【 display / non-display 】

Graduating School 【 display / non-display 】

Graduating School 【 display / non-display 】

• 　

  -

  1991.03

  Oita National College of Technology     Graduated

• 　

  -

  1993.03

  Ibaraki University   Faculty of Science   Department of Physics   Graduated

Graduate School 【 display / non-display 】

Graduate School 【 display / non-display 】

• 　

  -

  1998.03

  Hiroshima University  Graduate School, Division of Natural Science  Physics  Doctor's Course  Completed

• 　

  -

  1995.03

  Hiroshima University  Graduate School, Division of Natural Science  Physics  Master's Course  Completed

Campus Career 【 display / non-display 】

Campus Career 【 display / non-display 】

• 2016.09

  -

  Now

  IWATE University   Professor   [Duty]

• 2009.11

  -

  2016.08

  IWATE University   Associate Professor   [Duty]

• 2007.04

  -

  2009.10

  IWATE University   Assistant Professor   [Duty]

• 2001.04

  -

  2007.03

  IWATE University   Research Assistant   [Duty]

External Career 【 display / non-display 】

External Career 【 display / non-display 】

• 1998.08

  -

  2001.03

    Part-Time Researcher for University or Other Academic Organization  

Research Areas 【 display / non-display 】

Research Areas 【 display / non-display 】

• Plasma Science and Technology

• Natural Science / Semiconductors, optical properties of condensed matter and atomic physics

• Manufacturing Technology (Mechanical Engineering, Electrical and Electronic Engineering, Chemical Engineering) / Electric and electronic materials

• Natural Science / Theoretical studies related to particle-, nuclear-, cosmic ray and astro-physics

• Others / Others

Course Subject 【 display / non-display 】

Course Subject 【 display / non-display 】

• 2006

  English Training for Electrical and Electronic Engineering Ⅱ

• 2006

  Advanced Electrical Engineering Laboratory

• 2006

  Applied Electrical Engineering Laboratory

• 2006

  Fundamental Electrical Engineering Laboratory

• 2006

  Physics Laboratory

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Published Papers 【 display / non-display 】

Published Papers 【 display / non-display 】

• Silicon Wafer Etching Rate Characteristics with Burst Width Using 150 kHz Band High-Power Burst Inductively Coupled Plasma

  Hisaki Kikuchi, Katsuyuki Takahashi, Seiji Mukaigawa, Koichi Takaki and Ken Yukimura

  Micromachines ( MDPI )  12 ( 1 ) 599   2021.05  [Refereed]

  Bulletin of University, Institute, etc.  Multiple authorship

  DOI

• Shoki Abe, Katsuyuki Takahashi, Seiji Mukaigawa, Koichi Takaki, Ken Yukimura

  Shoki Abe, Katsuyuki Takahashi, Seiji Mukaigawa, Koichi Takaki, Ken Yukimura

  Japanese Journal of Applied Physics ( Japan Society of Applied Physics )  60 ( 1 ) 015501   2020.12  [Refereed]

  Bulletin of University, Institute, etc.  Multiple authorship

  DOI

• Characteristics of Self-Organized Structure in Microgap Dielectric Barrier Discharge at Atmospheric Pressure

  Hideki Sato, Sou Murakami, Seiji Mukaigawa, Katsuyuki Takahashi, Koichi Takaki

  IEEE Transactions on Plasma Science ( IEEE Nuclear and Plasma Sciences Society )  49 ( 1 ) 91 - 97   2020.08  [Refereed]

  Bulletin of University, Institute, etc.  Multiple authorship

  DOI

• Silicon wafer etching by pulsed high-power inductively coupled Ar/CF4 plasma with 150 kHz band frequency

  Yuma Saito, Kodai Shibata, Katsuyuki Takahashi, Seiji Mukaigawa, Koichi Takaki, Ken Yukimura, Hisato Ogiso, Shizuka Nakano

  Japanese Journal of Applied Physics   59   SHHE0   2020.03  [Refereed]

  Bulletin of University, Institute, etc.  Multiple authorship

• Global model analysis of Ar inductively coupled plasma driven by a 150 kHz-band high-power pulse burst

  Yuma Saito, Kodai Shibata, Katsuyuki Takahashi, Seiji Mukaigawa, Koichi Takaki, Ken Yukimura

  Japanese Journal of Applied Physics   58   SAAB06   2019.01  [Refereed]

  Bulletin of University, Institute, etc.  Multiple authorship

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Presentations 【 display / non-display 】

Presentations 【 display / non-display 】

• Characteristics of 150 kHz Band High Power Burst Inductively Coupled Nitrogen Plasma

  Oral Presentation(General)  Hikaru SUENAGA, Hisaki KIKUCHI, Seiji MUKAIGAWA, Katsuyuki TAKAHASHI, Koichi TAKAKI

  2022.01

  　

  　

• Observation of the self-organised structure of atmospheric pressure nitrogen microgap dielectric barrier discharge

  Oral Presentation(General)  Ryota Akaishi, Katuyuki Takahashi, Koichi Takaki,Seiji Mukaigawa

  2022.01

  　

  　

• Generation of filamentary microwave discharge plasma in atmospheric pressure

  Oral Presentation(General)  Tsubasa Saito, Zentaro Sasaki, Takaharu Kamada, Katsuyuki Takahashi, Koichi Takaki, Seiji Mukaigawa

  2022.01

  　

  　

• Control of spatial distribution in E-mode inductively coupled plasmas using a Faraday shield

  Oral Presentation(General)  Ren Miura, Takaharu Kamada, Katsuyuki Takahashi, Koichi Takaki, Seiji Mukaigawa

  2021.01

  　

  　

• Numerical analysis of the time evolution of the self-organized pattern in dielectric barrier discharges based on the reaction-diffusion equation

  Oral Presentation(General)  Sou Murakami, Hideki Sato, Katuyuki Takahashi, Koichi Takaki, Seiji Mukaigawa

  2021.01

  　

  　

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Association Memberships 【 display / non-display 】

Association Memberships 【 display / non-display 】

• 9999.01

  　

  　

   

  The Institute of Electrical Engineers of Japan

• 9999.01

  　

  　

   

  The Physical Society of Japan

• 9999.01

  　

  　

   

  The Japan Society of Applied Physics

Academic Activity 【 display / non-display 】

Academic Activity 【 display / non-display 】

• 2018.10

  -

  2019.09

  The Institute of Electrical Engineers of Japan  

• 2016.10

  -

  2017.09

  The Physical Society of Japan  

• 2016.05

  　

  　

  The Institute of Electrical Engineers of Japan  

• 2014.04

  -

  2017.03

  The Institute of Electrical Engineers of Japan  

• 2014.04

  -

  Now

  The Japan Society of Applied Physics  

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