|
Affiliation |
IWATE University Faculty of Science and Engineering Department of Systems Innovation Engineering Studies in Electrical, Electronic, and Communication Engineering |
|
Position |
Professor |
|
Year of Birth |
1970 |
MUKAIGAWA Seiji
|
|
|
Research Interests 【 display / non-display 】
-
Elementary Particles
-
Semiconductor
-
Electrical Discharge
-
Plasma
Graduating School 【 display / non-display 】
-
-1991.03
Oita National College of Technology Graduated
-
-1993.03
Ibaraki University Faculty of Science Department of Physics Graduated
Graduate School 【 display / non-display 】
-
-1998.03
Hiroshima University Graduate School, Division of Natural Science Physics Doctor's Course Completed
-
-1995.03
Hiroshima University Graduate School, Division of Natural Science Physics Master's Course Completed
Campus Career 【 display / non-display 】
-
2016.09-Now
IWATE University Professor [Duty]
-
2009.11-2016.08
IWATE University Associate Professor [Duty]
-
2007.04-2009.10
IWATE University Assistant Professor [Duty]
-
2001.04-2007.03
IWATE University Research Assistant [Duty]
External Career 【 display / non-display 】
-
1998.08-2001.03
Part-Time Researcher for University or Other Academic Organization
Research Areas 【 display / non-display 】
-
Plasma Science and Technology
-
Natural Science / Semiconductors, optical properties of condensed matter and atomic physics
-
Manufacturing Technology (Mechanical Engineering, Electrical and Electronic Engineering, Chemical Engineering) / Electric and electronic materials
-
Natural Science / Theoretical studies related to particle-, nuclear-, cosmic ray and astro-physics
-
Others / Others
Course Subject 【 display / non-display 】
-
2006
English Training for Electrical and Electronic Engineering Ⅱ
-
2006
Advanced Electrical Engineering Laboratory
-
2006
Applied Electrical Engineering Laboratory
-
2006
Fundamental Electrical Engineering Laboratory
-
2006
Physics Laboratory
Published Papers 【 display / non-display 】
-
Observation of the stripe and filamentary self-organized structure of atmospheric pressure nitrogen microgap dielectric barrier discharge
Ryota Akaishi, Katuyuki Takahashi, Koichi Takaki, Seiji Mukaigawa
Recent trends in technologies of pulse power, high-density plasma and particle beams ( National Institute for Fusion Science ) 2023.03
Others Multiple authorship
-
Filamentation of 2.45-GHz microwave discharge plasmas in sub-atmospheric pressure
Zentarou Sasaki, Tsubasa Saito, Takaharu Kamada, Katsuyuki Takahashi, Koichi Takaki, Seiji Mukaigawa
Recent trends in technologies of pulse power, high-density plasma and particle beams ( National Institute for Fusion Science ) 2023.03
Others Multiple authorship
-
Influence of Gas Species on Electrical Characteristics of High-Power Pulsed Sputtering
Taishin Sato, Katsuyuki Takahashi, Seiji Mukaigawa, Koichi Takaki
Recent trends in technologies of pulse power, high-density plasma and particle beams ( National Institute for Fusion Science ) 2023.03
Others Multiple authorship
-
Silicon Wafer Etching Rate Characteristics with Burst Width Using 150 kHz Band High-Power Burst Inductively Coupled Plasma
Hisaki Kikuchi, Katsuyuki Takahashi, Seiji Mukaigawa, Koichi Takaki and Ken Yukimura
Micromachines ( MDPI ) 12 ( 1 ) 599 2021.05 [Refereed]
Bulletin of University, Institute, etc. Multiple authorship
-
Shoki Abe, Katsuyuki Takahashi, Seiji Mukaigawa, Koichi Takaki, Ken Yukimura
Shoki Abe, Katsuyuki Takahashi, Seiji Mukaigawa, Koichi Takaki, Ken Yukimura
Japanese Journal of Applied Physics ( Japan Society of Applied Physics ) 60 ( 1 ) 015501 2020.12 [Refereed]
Bulletin of University, Institute, etc. Multiple authorship
Books 【 display / non-display 】
-
Power Electronics
2024.01 ISBN: 978-4-8446-0943-8
Textbook
Presentations 【 display / non-display 】
-
Observation of argon plasma driven by 150 kHz band high power burst pulse voltage
Poster (General) K. Takahashi, N. Takahashi, H. Suenaga, S. Mukaigawa, K. takaki
The 44th International Symposium on Dry Process (DPS2023) (Winc Aichi, Nagoya, Japan)
2023.11 -
Production of High-Density Plasma by 150 kHz Band Burst Pulse for One-Inch Etching Process
Oral Presentation(General) Koichi Takaki, Naohiro Takahashi, Katsuyuki Takahash, Seiji Mukaigawa
The 7th Taiwan-Japan Workshop on Plasma Life Science and Technology (National Yang Ming Chiao Tung University, Hsinchu, Taiwan)
2023.10 -
Generation of 2.45-GHz microwave plasma filament in sub-atmospheric pressure
Oral Presentation(General) Zentarou Sasaki, Tsubasa Saito, Takaharu Kamada, Katsuyuki Takahashi, Koichi Takaki, Seiji Mukaigawa
2022.10 -
Characteristics of DLC films deposited by pseudo-spark discharge PE-CVD with different substrate bias voltages
Oral Presentation(General) Takaharu Kamada, Masayuki Watanabe, Yoshitaka Nakamura, Seiji Mukaigawa
2022.10 -
Observation of the stripe and filamentary self-organized structure of atmospheric pressure nitrogen microgap dielectric barrier discharge
Oral Presentation(General) Ryota Akaishi, Ryoya Karino, Katuyuki Takahashi, Koichi Takaiki, Seiji Mukaigawa
2022.10
Association Memberships 【 display / non-display 】
-
9999.01
The Institute of Electrical Engineers of Japan
-
9999.01
The Japan Society of Applied Physics
-
9999.01
The Physical Society of Japan
Academic Activity 【 display / non-display 】
-
2024.05-2026.05
The Institute of Electrical Engineers of Japan
-
2024.04-2026.03
The Institute of Electrical Engineers of Japan
-
2024.04-2026.03
The Japan Society of Applied Physics
-
2022.09-2023.12
The Japan Society of Applied Physics
-
2022.05-2024.05
The Institute of Electrical Engineers of Japan